Products for Plasma Technology
For Plasma Technology we provide Radio Frequency Generators and Matching Networks.
For special applications we also make RF Broadband Generators.
These products are suitable to be used for ICP and CCP systems.
They have been applied successfully in
Plasma Assist for Atomic Layer Deposition (ALD)
Atomic Layer Etching
RF Sputtering
Thin Film Coating
PE-CVD
Reactive Ion Etching (RIE)
Substrate Biasing
Electrical Asymmetry Effect (EAE) / Voltage Waveform Tailoring
Radio Frequency Generators
All RF Generator series employ state of the art technology.
RFG-L
advanced options list
touch panel display
PowerCube
Matching Eye
large 7 segment display
Shoebox
compact design
most cost efficient
Features
RFG-L | PowerCube | Shoebox | |
19 inch | 1/2 x 19 inch | non 19 inch | |
2U / 3U / 4U | 4U | - | |
1 - 100 (narrow) | 2 / 4 / 13.56 / 27.12 / 40.68 | 13.56 | MHz |
100 - 2000 | 300 - 1200 | 100 - 600 | W |
Matching Networks
All Matching Networks can be controlled by any of our RF Generators.
MatchingCube-A
air capacitors
modular coil
MatchingCube-V
MiniMatch
vacuum capacitors
compact design
Features
MC-A | MC-V | MM | |
air capacitors | vacuum capacitors | vacuum capacitors | |
500 / 1000 | 500 / 1000 | 125 / 125 | pF |
max. 3 | max. 3 | none | uH |
max. 600 | max. 2500 | max. 2000 | W typ. |
More
Broadband RF Generators
In some cases it is desirable to alter the frequency in order find the sweet spot for the specific application.
For this purpose we designed our broadband RF generators.
They are based on the RFG-L platform.
Models
| Frequency Bandwidth | Output Power | Platform |
RFG-1/10-1000 | 1-10 MHz | 1000 W | RFG-5U |
RFG-4/42-xxx | 4-42 MHz | 400 / 800 W | RFG-4U |
RFG-4/42-1600 | 4-42 MHz | 1600 W | RFG-5U |
RFG-1/10-1000 | 4-42 MHz | 1000 W | RFG-5U |
RFG-10/100-100 | 10-100 MHz | 100 W | RFG-3U |
RFG-10/70-xxx | 10-70 MHz | 300 / 500 W | RFG-3U |
RFG-20/80-xxx | 20-80 MHz | 300 / 500 W | RFG-3U |
RFG-60/80-xxx | 60-80 MHz | 300 / 500 W | RFG-3U |
Other models are available. Get more information.
Switches and Filters RF/DC
Switches and Filters we build according to customers requests.
Models (examples)
HFSW-1/2-1000 | RF Switch 1:2 / max. 1000W @50 Ohms |
HFSW-1/2-5000 | RF Switch 1:2 / max. 5000W @50 Ohms |
HFSW-1/3-5000 | RF Switch 1:3 / max. 5000W @50 Ohms |
HFSW-1/4-5000 | RF Switch 1:4 / max. 5000W @50 Ohms |
HFSW-2/5-300 | RF Switch 2:5 / max. 300W @50 Ohms |
DCSW-1/2-850-4x | DC Switch 1:2 (4x) / max. 800V / max. 3.5A |
Other models are available. Get more information.
We can modify our equipment so that it is capable to be employed in EAE systems.
We also offer a dedicated signal source for that purpose.
Please see also our references on that topic.
Get more information.
References