Table of Contents
Options for Plasma Products
RF Generators
The barthel RF Generators can deliver a pulsed RF signal.
You can set the pulse length and the pulse period in order to define the pulsing.
In order to make these settings effective you set the pulse mode to internal
(default).
As soon as you turn the pulse ON
the RF Generator will deliver the pulsed RF signal accordingly.
The option External Pulsing allows to connect an external pulse signal with TTL level.
When you set the pulse mode to external
the generator will synchronize with the external pulse signal.
As soon you turn the pulse ON
the RF Generator will deliver the pulsed RF signal accordingly.
This allows you also to synchronize with other equipment.
The option External Oscillator – sometimes called Common Exciter – enables the RF Generator to adopt an external RF signal. This way you can run two or more RF Generators phase locked. The external signal shall come with TTL signal.
Phase Synchronization / Phase Shifter
If your RF Generator comes with the option External Oscillator it may also be equipped with the option Phase Sync. In this combination the RF Generator can shift the incoming RF signal in its phase. This way you cannot only phase lock two or more RF Generators. In addition you can control the signal phases between the RF Generators.
This is beneficial for
- biasing applications
- voltage wafeform tailoring / electrical asymmetry effect (EAE)
- etc.
The option Frequency Shift Tuning enables the RF Generator to vary the frequency by approximately ±3.5%. The RF Generator may vary the frequency in order to improve matching conditions. Depending on the load impedance this frequency shift may be sufficient to find good matching conditions with employing a fixed match only.
In the majority of applications matching conditions is reached by two variable capacitors – CLoad
and CTune
– in the matching network.
Such a matching network is able to match a larger range of load impedances in the Smith Chart.
However, varying such capacitors involves motors in order to move the capacitor plates.
Hence, the matching procedure employing Frequency Shift Tuning is much faster since no mechanical parts are involved.
Caution should be taken though when the operating frequency leaves the ISM band. This should be taken into account for the EMC concept.
Matching Networks
The equipment comes with a 7/16 type output connector. With this option you will receive a coaxial adapter to N type.
Instead of a standard coaxial output connector the Matching Network can be equiped with a flange connection.
The barthel Matching Networks can be controlled either by a barthel RF Generator or by its serial interface using the ControlPanel software.
If the Matching Network is equipped with the option Display the Match comes with a LC Display on its front.
It shows the capacitor positions for CLoad
and CTune
.
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