Table of Contents
Products for Plasma Technology
For Plasma Technology we provide Radio Frequency Generators and Matching Networks. For special applications we also make RF Broadband Generators. These products are suitable to be used for ICP and CCP systems. They have been applied successfully in
- Plasma Assist for Atomic Layer Deposition (ALD)
- Atomic Layer Etching
- RF Sputtering
- Thin Film Coating
- PE-CVD
- Reactive Ion Etching (RIE)
- Substrate Biasing
- Electrical Asymmetry Effect (EAE) / Voltage Waveform Tailoring
Radio Frequency Generators
All RF Generator series employ state of the art technology.
RFG-L
- advanced options list
- touch panel display
PowerCube
- Matching Eye
- large 7 segment display
Shoebox
- compact design
- most cost efficient
Matching Networks
All Matching Networks can be controlled by any of our RF Generators.
MatchingCube-A
- air capacitors
- modular coil
MatchingCube-V
- vacuum capacitors
- bandwidth extension available
MiniMatch
- vacuum capacitors
- compact design
More
Broadband RF Generators
In some cases it is desirable to alter the frequency in order find the sweet spot for the specific application. For this purpose we designed our broadband RF generators. They are based on the RFG-L platform.
Other models are available. Get more information.
Switches and Filters RF/DC
Switches and Filters we build according to customers requests.
Other models are available. Get more information.
Electrical Asymmetry Effect (EAE) / Voltage Waveform Tailoring
We can modify our equipment so that it is capable to be employed in EAE systems. We also offer a dedicated signal source for that purpose. Please see also our references on that topic.
References
RF Generator for the International Space Station
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