barthel HF-Technik GmbH

• Mount the MatchingCube into your plasma system and connect it accordingly.
• Control the device with the ControlPanel.
• Set Matching Mode to Manual.
• Set CL and CT to values that will allow ignition.
• Turn the RF generator on with the minimum power necessary for igniting plasma.
• Match the load manually until Current impedance shows close to 50Ω ∠0°.

• Vary CL in 3 steps in both directions so that:
  • plasma remains
  • the variation in Current impedance is significant.
• Fill out the following tabular.

• Vary CT in 3 steps (usually much smaller than CL) in both directions so that:
  • plasma remains
  • the variation in Current impedance is significant.
• Fill out the following tabular.

CL: Magnitude Gain

• Draw a graph MAG(CL). The graph must be monotone.
• If its slope is
  • positive: CL Magnitude gain must be positive, e.g. 10
  • negative: CL Magnitude gain must be negative, e.g. -10

CL: Phase Gain

• Draw a graph PHASE(CL).
• If the graph is not monotone set CL Phase gain to 1.
• If its slope is
  • positive: CL Phase gain must be positive, e.g. 20
  • negative: CL Phase gain must be negative, e.g. -20

CT: Magnitude Gain

• Draw a graph MAG(CT).
• If the graph is not monotone set CT Magnitude gain to 0.
• If its slope is
  • positive: CT Magnitude gain must be positive, e.g. 5
  • negative: CT Magnitude gain must be negative, e.g. -5

CT: Phase Gain

• Draw a graph PHASE(CT). The graph must be monotone.
• If its slope is
  • positive: CT Phase gain must be positive, e.g. 20
  • negative: CT Phase gain must be negative, e.g. -20

For calculating the gain parameters more accurately

• request a specific calculation sheet from us or
• send your findings to us, we will do the math for you

• Set matching mode to Auto.

The MatchingCube shall now hold the matching condition.

• If the auto match seems to be a little nervous decrease the respective gain parameter(s).
• If the auto match takes a little long to match increase the respective gain paramter(s).