barthel HF-Technik GmbH

• Hook up the RF generator and the matching network with the plasma chamber.
• Prepare the plasma chamber and turn on the RF.
• Match the load impedance of the plasma chamber so that the RF generator shows 0W reflected power.

• Set the matching network to Manual Operation.
• Turn off the RF.

• Connect a small signal 50 Ohms load to the input of the matching network.
• Measure the impedance of the output port of the matching network using a network analyzer.

The load impedance of the plasma chamber is the conjugate complex of the measured value.

If you do not happen to have a network analyzer available: NanoVNA.