How to set the tuning window.

The MatchingCube contains two variable capacitors, CT and CL. The capacitors can vary their capacitance from CTMIN to CTMAX and from CLMIN to CLMAX, respectively. The tuning algorithm varies both capacitances in order to find a matching point. The load impedance of a plasma chamber is complex.

Sometimes there are more than one matching points. In these cases usually one matching point is desired and another is not. It may be that plasma is ignited only at the desired matching point but not at the other.

In order to cope with such conditions you can narrow the tuning window. This application note describes how to do this.

Prepare the system.

Set the tuning window.

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